6533b85cfe1ef96bd12bd431
RESEARCH PRODUCT
Technologies for the fabrication of cylindrical fine line devices
C. GiaconiaGiuseppe LulloC. Arnonesubject
Materials scienceFabricationbusiness.industryMetal coatingFine lineCondensed Matter PhysicsSettore ING-INF/01 - ElettronicaAtomic and Molecular Physics and OpticsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsMicrolithography 3-D Litography MicrofabricationEtching (microfabrication)OptoelectronicsElectrical and Electronic Engineeringbusinessdescription
Abstract A microlithographic process suited for metal patterning on cylindrical substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1997-02-01 |