6533b871fe1ef96bd12d0eee
RESEARCH PRODUCT
Copper patterning on dielectrics by laser writing in liquid solution
C. ArnoneC. GiaconiaL. Minìsubject
FabricationMaterials sciencePhysics and Astronomy (miscellaneous)business.industryCopper Laser writingAnalytical chemistrychemistry.chemical_elementengineering.materialLaserCopperSettore ING-INF/01 - Elettronicalaw.inventionSurface coatingCoatingchemistrylawEtchingengineeringOptoelectronicsMicroelectronicsLaser power scalingbusinessdescription
A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1994-06-20 |