Graded reflectivity micromirror arrays

6533b85dfe1ef96bd12bdfb1

RESEARCH PRODUCT

Graded reflectivity micromirror arrays

P. Cusumano Angelo Mangione C. Arnone Giuseppe Lullo

subject

Laser technology Materials science Optics business.industry Materials Science (miscellaneous)Physical vapor deposition Optoelectronics Business and International Management business Optical arrays Reflectivity Industrial and Manufacturing Engineering Laser beams

description

A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.

year	journal	country	edition	language
2002-03-20	Applied Optics

https://doi.org/10.1364/ao.41.000143

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