6533b7d2fe1ef96bd125ec44
RESEARCH PRODUCT
Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks
U. Lo CiceroU. Lo CiceroAlfonso ColluraGiuseppe LulloC. ArnoneMarco BarberaMarco Barberasubject
Shadow maskX-ray detectorShadow evaporationFabricationMaterials scienceMicrocalorimeter arrayNTD-GeX-ray detectorchemistry.chemical_elementGermaniumPhotoresistSettore ING-INF/01 - Elettronicalaw.inventionOpticslawGeneral Materials SciencePyramid (geometry)Free-standing maskbusiness.industryBolometerCondensed Matter PhysicsAtomic and Molecular Physics and OpticsElectrical contactschemistryX-ray spectroscopybusinessdescription
In our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation through a butterfly shaped shadow mask, made of a five microns thick free-standing microstructured copper film. The process to fabricate the shadow mask, using microlithography and electrodeposition techniques, is also described.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2011-11-30 |