6533b835fe1ef96bd129e885
RESEARCH PRODUCT
The laser-plotter: A versatile lithographic tool for integrated optics and microelectronics
C. Arnonesubject
business.industryComputer scienceCondensed Matter PhysicsLaserAtomic and Molecular Physics and OpticsSurfaces Coatings and FilmsElectronic Optical and Magnetic Materialslaw.inventionOpticslawPlotterMicroelectronicsOptoelectronicsIntegrated opticsElectrical and Electronic EngineeringbusinessLithographydescription
Abstract The apparatus described here represents a low cost approach to artwork generation for integrated optics and microelectronics, in the resolution range around 2 μm. Its main characteristics are given below, together with some examples of the kind of patterns it can generate.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1992-03-01 | Microelectronic Engineering |