0000000000336293
AUTHOR
A. Vizcaíno-de-julián
Ultra-fast intensified frame images from an electron cyclotron resonance hydrogen plasma at 2.45 GHz: some space distributions of visible and monochromatic emissions.
First results from an ultra-fast frame image acquisition diagnostic coupled to a 2.45 GHz microwave hydrogen discharge are presented. The plasma reactor has been modified to include a transparent doubled shielded quartz window allowing to viewing the full plasma volume. Pictures describing the breakdown process at 1μs exposure time have been obtained for integrated visible light signal, Balmer-alpha, Balmer-beta lines, and Fulcher-band. Several different plasma emission distributions are reported. The distribution depends on the magnetic field configuration, incident microwave power, and neutral gas pressure. peerReviewed
Plasma distributions observed in a 2.45 GHz hydrogen discharge
The existence of various spatial distributions of hydrogen plasma in a pulsed 2.45 GHz microwave discharge is demonstrated. The data has been obtained through optical emission diagnostics utilizing an ultra-fast CCD camera system with multi-channel plate (MCP) intensifiers, and a wavelength-filtered photodiode recording temporal light emission signals of hydrogen atoms and molecules. It has been observed that the magnetic field topology and strength are determining the transitions between different plasma patterns and spectral saturation times while neutral gas pressure and microwave power show a weaker influence on the profiles but affect the emitted light intensity.
Experimental study of hydrogen plasma breakdown in a 2.45 GHz microwave discharge
Temporal evolution of microwave-plasma coupling, vacuum ultraviolet (VUV) light emission and plasma electron temperature and density is reported for a 2.45GHz microwave hydrogen discharge pulsed at 50Hz. Directional couplers, a VUV spectrometer and a Langmuir probe are used for the diagnostics of the plasma breakdown. A 5‐10 µs transient peak of light emission exceeding the steady-state intensity by a factor of 3.3 is observed in coincidence with an abrupt drop in the microwave electric field. Observed light emission intensities combined with cross section data indicate that the electron temperature during the breakdown transient exceeds the steady-state value of 4‐6eV by a factor 3, which …