0000000000347226

AUTHOR

Tom Yager

0000-0003-2115-8942

showing 2 related works from this author

Radiation resistance of nanolayered silicon nitride capacitors

2020

Abstract Single-layered and multi-layered 20–60 nm thick silicon nitride (Si3N4) dielectric nanofilms were fabricated using a low-pressure chemical vapour deposition (LPCVD) method. The X-ray photoelectron spectroscopy (XPS) confirmed less oxygen content in the multi-layered nanofilms. The capacitors with Si3N4 multilayer demonstrated a tendency to a higher breakdown voltage compared to the capacitors with Si3N4 single layer. Si3N4 nanofilms and capacitors with Si3N4 dielectric were exposed to 1 kGy dose of gamma photons. Fourier transform infrared (FTIR) spectroscopy analysis showed that no modifications of the chemical bonds of Si3N4 were present after irradiation. Also, gamma irradiation…

010302 applied physicsNuclear and High Energy PhysicsMaterials sciencebusiness.industry02 engineering and technologyDielectricChemical vapor deposition021001 nanoscience & nanotechnology01 natural sciencesCapacitancelaw.inventionchemistry.chemical_compoundCapacitorSilicon nitridechemistrylaw0103 physical sciencesOptoelectronicsBreakdown voltageIrradiation0210 nano-technologybusinessInstrumentationRadiation resistanceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Time-resolved FDTD and experimental FTIR study of gold micropatch arrays for wavelength-selective mid-infrared optical coupling

2021

The work was partially supported by Sweden's innovation agency Vinnova (Large area CVD graphene-based sensors/IR-photodetectors 2020-00797) and EU CAMART2 project (European Union's Horizon 2020 Framework Programme H2020-WIDESPREAD-01-2016-2017-TeamingPhase2 under grant agreement No.739508). TY acknowledges European Regional Development Fund Project No. 1.1.1.2/VIAA/4/20/740.

Materials sciencenano fabricationInfraredFDTDMathematicsofComputing_GENERALInfrared spectroscopyPhotodetectorTP1-118502 engineering and technologyFar field opticsInfrared sensing7. Clean energy01 natural sciencesBiochemistrynear field opticsAnalytical Chemistry010309 opticselectron beam lithography0103 physical sciencesTransmittanceArray data structureElectrical and Electronic EngineeringInstrumentationinfrared sensingNear field opticsbusiness.industryChemical technologyCommunicationNear-field opticsFinite-difference time-domain methodmetal micropatch arrays021001 nanoscience & nanotechnologyAtomic and Molecular Physics and Opticsfar field opticsWavelengthFTIR:NATURAL SCIENCES [Research Subject Categories]OptoelectronicsElectron beam lithography0210 nano-technologybusinessMetal micropatch arraysNano fabrication
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