Formation of Optical Gradient in Chemical Solution-Derived PbZr[sub 0.52]Ti[sub 0.48]O[sub 3] Thin Films: Spectroscopic Ellipsometry Investigation

2009

Investigation using a variable angle spectroscopic ellipsometer revealed the influence of sample preparation conditions on sol-gel PbZr 0.52 Ti 0.48 O 3 (PZT 52/48) thin-film homogeneity that allows identification and further optimization of thin-film performance. Separate crystallization of the layers determined the optical gradient appearance, irrespective of the chemical solvents used in this work. A more refined analysis showed that a refractive index gradient was apparent in the samples in which lattice parameters strongly changed with thickness. For these films, energy-dispersive X-ray spectroscopy analysis showed significant variation in Pb and Zr. Additionally, complex dielectric fu…