0000000000404289

AUTHOR

Johannes Boneberg

Surface acceleration during dry laser cleaning of silicon

We report on measurements of the surface acceleration for the application of dry laser cleaning. For that purpose, industrial silicon samples were irradiated by a frequency-doubled Q-switched Nd:YAG laser. The surface displacement was measured by a heterodyne interferometer and recorded by a digital storage oscilloscope. Several hundreds of shots were averaged to give smooth displacement curves which could be derived numerically. The experiments show that the highest accelerations, which are thought to be responsible for the cleaning, occur on the time scale of the laser pulse. Simple theoretical models are in good agreement with the experimental data. The maximal displacement depends only …

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Laser cleaning of oxide iron layer : efficiency enhancement due to electrochemical induced absorptivity change

Laser cleaning experiments exhibited a higher cleaning efficiency of the laser cleaning upon application of electrochemical potential on an oxidised iron surface. The objective of this study is to clarify the role of such an electrochemical control on cleaning efficiency. Therefore a study by optical spectrometry at normal incidence in the relevant conditions was performed. From these measurements the optical parameters n and k were deduced. While n is mainly not affected, k changes for a factor of 10 upon application of an electrochemical potential. These results explain the differences in laser cleaning efficiency due to the modified absorption length.

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