0000000000409237

AUTHOR

Thierry Belmonte

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<br /> Ga_2O_3 films alloyed with SnO_2 and treated by RF plasma: an interesting way for the development of transparent contacts for UV-emittin…

2016

International audience; Layers of Ga2O3 alloyed up to 15 at% with Sn4+ has been studied after treatment by RF plasma. An increased conductivity was measured which is an interesting step towards transparent contacts for UV-emitting photonics devices.

Materials sciencebusiness.industry02 engineering and technologyChemical vapor depositionPlasmaConductivity021001 nanoscience & nanotechnologyMass spectrometry01 natural sciences[SPI.MAT]Engineering Sciences [physics]/Materials010309 opticsTransmission electron microscopy0103 physical sciencesOptoelectronicsPhotonics0210 nano-technologybusinessAfter treatment13th International Conference on Fiber Optics and Photonics
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