6533b7ddfe1ef96bd1273fd5
RESEARCH PRODUCT
<br /> Ga_2O_3 films alloyed with SnO_2 and treated by RF plasma: an interesting way for the development of transparent contacts for UV-emitting photonics devices
Frédéric GentyPascal BouletAdulfas AbrutisAusrine BartasyteSamuel MargueronAlban MaertensThierry Belmontesubject
Materials sciencebusiness.industry02 engineering and technologyChemical vapor depositionPlasmaConductivity021001 nanoscience & nanotechnologyMass spectrometry01 natural sciences[SPI.MAT]Engineering Sciences [physics]/Materials010309 opticsTransmission electron microscopy0103 physical sciencesOptoelectronicsPhotonics0210 nano-technologybusinessAfter treatmentdescription
International audience; Layers of Ga2O3 alloyed up to 15 at% with Sn4+ has been studied after treatment by RF plasma. An increased conductivity was measured which is an interesting step towards transparent contacts for UV-emitting photonics devices.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2016-12-04 | 13th International Conference on Fiber Optics and Photonics |