Automatable sample fabrication process for pump-probe X-ray holographic imaging

Soft X-ray holography is a recently developed imaging technique with sub-50 nm spatial resolution. Key advantages of this technique are magnetic and elemental sensitivity, compatibility with imaging at free electron laser facilities, and immunity to in-situ sample excitations and sample drift, which enables the reliable detection of relative changes between two images with a precision of a few nanometers. In X-ray holography, the main part of the experimental setup is integrated in the sample, which consequently requires a large number of fabrication steps. Here we present a generic design and an automatable fabrication process for samples suitable, and optimized for, efficient high resolut…