<title>Miniaturized objective lens for a photoelectron emission microscope</title>

Photoemission electron microscopy (PEEM) has turned out to be one of the most promising methods for surface analysis in the recent years. It is a full field imaging technique based on the emission of secondary electrons by far ultraviolet light or X-rays. The emission intensity of secondary electrons is critically dependent upon the acceptance angle of the incident radiation. However, the size of the microscope restricts this angle substantially. Miniaturizing the objective lens of the microscope reduces the restriction of the acceptance angle and improves the performance of the PEEM considerably. We report on the fabrication of a miniaturized objective lens containing the extraction electr…