UV Metal Semiconductor Metal Detectors. A Robust Choice for (Al,Ga)N Based Detectors

UV detection is interesting for combustion optimization, air contamination control, fire and solar blind rocket launching detection. Most of these applications require that UV detectors have a huge dynamic response between UV and the visible, and a very low dark current in the range of the UV flux measured. (Al,Ga)N alloys present a large direct bandgap in this range and therefore can be used as an active region in such detectors. To take advantage of the large Schottky barrier, the good alloy quality, and to avoid any doping problems, we have developed MSM photodetectors. High quality material has been grown with MOCVD and MBE on sapphire substrates. Stress management is employed for alumi…