Update on the TowerJazz CMOS DMAPS development for the ATLAS ITk

The upgrade of the ATLAS tracking detector for the High-Luminosity Large Hadron Collider at CERN requires the development of novel radiation hard silicon sensor technologies. For the de- velopment of depleted CMOS sensors for ATLAS we combined small electrodes with minimal capacitance and advanced processing for fully depleted active sensor volume to achieve radiation hard CMOS sensors in line with ATLAS ITk specifications. Based on initial studies on the prototype sensor “TowerJazz Investigator” we have now developed, produced and tested a first full-size depleted CMOS sensor based on the 180nm TowerJazz imag- ing process, the so-called “MALTA” sensor. The sensor combines special low-noise…