0000000000610103
AUTHOR
Stephane Melanson
showing 2 related works from this author
The extraction of negative carbon ions from a volume cusp ion source
2017
Acetylene and carbon dioxide gases are used in a filament-powered volume-cusp ion source to produce negative carbon ions for the purpose of carbon implantation for gettering applications. The beam was extracted to an energy of 25 keV and the composition was analyzed with a spectrometer system consisting of a 90° dipole magnet and a pair of slits. It is found that acetylene produces mostly C−2 ions (up to 92 µA), while carbon dioxide produces mostly O− with only trace amounts of C−. Maximum C−2 current was achieved with 400 W of arc power and, the beam current and composition were found to be highly dependent on the pressure in the source. The beam properties as a function of source settings…
A study of the optical effect of plasma sheath in a negative ion source using IBSIMU code
2020
A plasma sheath inside an ion source has a strong focusing effect on the formation of an ion beam from the plasma. Properties of the beam depend on the shape and location of the plasma sheath inside the source. The most accessible experimental data dependent on the plasma sheath are the beam phase space distribution. Variation of beam emittance is a reflection of the properties of the plasma sheath, with minimum emittance for the optimal shape of the plasma sheath. The location and shape of the plasma sheath are governed by complex physics and can be understood by simulations using plasma models in particle tracking codes like IBSimu. In the current study, a model of the D-Pace’s TRIUMF lic…