Benzene monitoring by micro-machined sensors with SnO2 layer obtained by using micro-droplet deposition technique

International audience; SnO2 thin layers were deposited by the way of the micro-droplet technique. The sensor substrate consisted of a thin membrane developed on oxidised silicon wafer. The sensing layers were deposited by means of the micro-droplet technique into thin layers of about 100 nm. Such devices were tested for benzene detection. The obtained results showed a very high sensitivity for this chemical compound since 500 ppb were detected. The results presented in this paper were not focused on the reactional mechanism of benzene detection but rather on the development of a cheap and sensitive sensor using sol-gel and micro-droplet processes. Since these layers were elaborated using s…