6533b82bfe1ef96bd128e0db
RESEARCH PRODUCT
Benzene monitoring by micro-machined sensors with SnO2 layer obtained by using micro-droplet deposition technique
Franck BergerBoutheina GhaddabValérie PotinJean-baptiste SanchezChristophe MavonP. YobouePhilippe Meninisubject
Materials scienceAnalytical chemistry02 engineering and technologySubstrate (electronics)Gas sensors01 natural scienceschemistry.chemical_compoundMaterials ChemistryCoupling (piping)WaferSol-gel processElectrical and Electronic EngineeringBenzeneInstrumentationBenzene detectionSol-gelThin layersbusiness.industry010401 analytical chemistryMetals and Alloys021001 nanoscience & nanotechnologyCondensed Matter PhysicsTin oxideeye diseases0104 chemical sciencesSurfaces Coatings and FilmsElectronic Optical and Magnetic Materials[CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistrychemistry[ CHIM.THEO ] Chemical Sciences/Theoretical and/or physical chemistryOptoelectronics0210 nano-technologybusinessLayer (electronics)SnO2description
International audience; SnO2 thin layers were deposited by the way of the micro-droplet technique. The sensor substrate consisted of a thin membrane developed on oxidised silicon wafer. The sensing layers were deposited by means of the micro-droplet technique into thin layers of about 100 nm. Such devices were tested for benzene detection. The obtained results showed a very high sensitivity for this chemical compound since 500 ppb were detected. The results presented in this paper were not focused on the reactional mechanism of benzene detection but rather on the development of a cheap and sensitive sensor using sol-gel and micro-droplet processes. Since these layers were elaborated using solely tin oxide, the as-obtained sensors are not selective but these one are intended to be used by coupling with additional devices such as chromatographic micro-column and micro-pre-concentrators.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2011-02-20 |