0000000000709027
AUTHOR
Fabien Formosa
Microfabrication of hybrid fluid membrane for microengines
International audience; This paper describes the microfabrication and dynamic characterization of thick membranes providing a technological solution for microengines. The studied membranes are called hybrid fluid-membrane (HFM) and consist of two thin membranes that encapsulate an incompressible fluid. This work details the microelectromechanical system (MEMS) scalable fabrication and characterization of HFMs. The membranes are composite structures based on Silicon spiral springs embedded in a polymer (RTV silicone). The anodic bonding of multiple stacks of Si/glass structures, the fluid filling and the sealing have been demonstrated. Various HFMs were successfully fabricated and their dyna…
PTMs developments for the appearance control on high-added value surfaces
International audience; In many areas of activity, the value of a product depends greatly on the perceived quality, including visual one. This work aims to better control sensory perception of products with high added value, especially on the first step of the visual control: the detection, or localization of anomalies in appearance to the surfaces. Companies have controllers, specially trained to locate and evaluate anomalies. These specialists have a higher sensitivity for the detection and evaluation of defects as a potential buyer for example, and this higher acuity is generally completed by a weighting of the intensity of defects according to their location. However, there is still gre…
Multi-scale analysis of surface topographies by modal filtering
International audience; This work introduces an innovative method for the multi-scale analysis of surface topographies, which consists of applying a method based on a new parameterization. This kind of surface parameterization refers to natural modes of vibration, and is therefore named modal parameterization. It allows us to characterize the form, waviness and roughness defects of a surface. This parameterization opens up new fields of analysis, such as the appearance quality of surfaces. It is thereby possible to decompose a measured surface in a vector basis, of which vectors are represented by plane natural eigenmodes sorted by frequency and complexity. Different filtering operations ca…