0000000000718968

AUTHOR

Andreas Bergmaier

showing 2 related works from this author

New experimental molecular stopping cross section data of Al2O3, for heavy ions

2014

Abstract Molecular stopping cross section data of Al2O3, for heavy ions of 12C, 16O, 28Si, 35Cl, 79Br within the energy range of 0.01–1.0 MeV/nucleon were measured. Both direct transmission and bulk analysis methods were applied. Stopping cross sections were calculated both with the SRIM and MSTAR codes. Evaluation and intercomparison of the new data with the calculated and previously measured ones are reported in this paper.

Nuclear and High Energy PhysicsRange (particle radiation)ta114ChemistryHadronCarbon-12Stopping cross section ; Stopping power ; ERDA ; Heavy ion IBA ; Light element analysisCharged particleIonNuclear physicsBaryonStopping power (particle radiation)NucleonInstrumentation
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Determination of molecular stopping cross section of 12C, 16O, 28Si, 35Cl, 58Ni, 79Br, and 127I in silicon nitride

2015

Abstract Silicon nitride is a technologically important material in a range of applications due to a combination of important properties. Ion beam analysis techniques, and in particular, heavy ion elastic recoil detection analysis can be used to determine the stoichiometry of silicon nitride films, which often deviates from the ideal Si3N4, as well as the content of impurities such as hydrogen, even in the presence of other materials or in a matrix containing heavier elements. Accurate quantification of IBA results depends on the basic data used in the data analysis. Quantitative depth profiling relies on the knowledge of the stopping power cross sections of the materials studied for the io…

Silicon nitrideNuclear and High Energy PhysicsIon beam analysisMaterials scienceta114HydrogenIon beam analysischemistry.chemical_elementHeavy ionsIonElastic recoil detectionchemistry.chemical_compoundchemistrySilicon nitrideImpurityThin filmAtomic physicsStopping powerInstrumentationStoichiometryNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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