Critical Influence of Dielectric Sensitive Material and Manufactured Process in Microwave Gas-Sensing: Application of Ammonia Detection with an Interdigital Sensor

In this paper, authors propose a study on microwave gas sensors and the influence of critical key parameters such as the sensitive material and the circuit conception process. This work aims to determine the influence of these parameters on the quality of the final response of the microwave gas sensor. The fixed geometry of the sensor is a microstrip interdigital capacitor coated with a sensitive layer excited with two 50 Ω SMA ports. The sensitive material has been chosen in order to interact with the target gas: ammonia. Indeed, this gas interacts with phthalocyanine and metal oxides like hematite, TiO2. To explore the effect of the circuit manufacturing process, three series of samples a…