0000000000789531
AUTHOR
Guillaume Legay
showing 2 related works from this author
Analyse locale des sensibilités des lectures angulaires, spectroscopiques et ellipsométriques de la Résonance des Plasmons de Surface en vue de la mi…
2006
The fluorescence labelling, used by the fluorescence biochips, is known to change the charge distribution of the labelled molecules and then modify their biological activity. Among label free biosensors, we choose an optical detection, such as spectroscopic ellipsometry and/or surface plasmon resonance (SPR) of the biolayers.These optical techniques are based on the measurement of both thickness and optical index of the adsorbed biolayer. An AFM statistical measurement of the thickness of functionalized lithographed microstructures has been performed in order to determine the thickness of the biolayers.We have shown that the spectroscopic reading of the SPR phase shift is 100 times more sen…
Changes in surface stress, morphology and chemical composition of silica and silicon nitride surfaces during the etching by gaseous HF acid
2007
International audience; HF acid attack of SiO2 and Si3N4 substrates is analyzed to improve the sensitivity of a sensor based on inicrocantilever. Ex situ analysis of the etching using XPS, SIMS and AFM show significant changes in the anisotropy and the rate of the etching of the oxides on SiO2 and Si3N4 surface. Those differences influence the kinetic evolution of the plastic bending deflection of the cantilever coated with SiO2 and Si3N4 layer, respectively. The linear dependence between the HF concentration and the Si3N4 cantilever bending corresponds to a deep attack of the layer whereas the nonlinear behavior observed for SiO2 layer can be explained by a combination of deep and lateral …