0000000000819851
AUTHOR
Yann Battie
Real-Time ellipsometric spectra without systematics errors
International audience; In real-time measurement, it is difficult to reduce systematic errors on spectra of ellipsometric angles Ψ and Δ by the mean of two measurementsat two analyzer positions with the incidence plane +45° and -45° [1-2]. Generally, the analyzer is mounted on a motorized rotation stage. Therotation of the optical component from -45° to +45° requires few seconds, and this is incompatible with dynamic measurements.
Design of a real-time spectroscopic rotating compensator ellipsometer without systematic errors
6th International Conference on Spectroscopic Ellipsometry (ICSE), Kyoto, JAPAN, MAY 26-31, 2013; International audience; We describe a spectroscopic ellipsometer in the visible domain (400-800 nm) based on a rotating compensator technology using two detectors. The classical analyzer is replaced by a fixed Rochon birefringent beamsplitter which splits the incidence light wave into two perpendicularly polarized waves, one oriented at +45 degrees and the other one at-45 degrees according to the plane of incidence. Both emergent optical signals are analyzed by two identical CCD detectors which are synchronized by an optical encoder fixed on the shaft of the step-by-step motor of the compensato…