6533b835fe1ef96bd129f1c7

RESEARCH PRODUCT

Real-Time ellipsometric spectra without systematics errors

subject

description

International audience; In real-time measurement, it is difficult to reduce systematic errors on spectra of ellipsometric angles Ψ and Δ by the mean of two measurementsat two analyzer positions with the incidence plane +45° and -45° [1-2]. Generally, the analyzer is mounted on a motorized rotation stage. Therotation of the optical component from -45° to +45° requires few seconds, and this is incompatible with dynamic measurements.