Author: Jan Spannhake

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AUTHOR

Jan Spannhake

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SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations

2007

MEMS micro heater devices capable of long-term operation at temperatures up to 1000 degrees C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film. (c) 2007 Elsevier B.V. All rights reserved.

Materials scienceFABRICATIONengineering.materialFILMSlaw.inventionlawImpurityMaterials ChemistryElectrical and Electronic EngineeringSILICONInstrumentationMicroelectromechanical systemsbusiness.industryMetals and AlloysCondensed Matter PhysicsTin oxideSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsMETALengineeringOptoelectronicsDegradation (geology)Noble metalResistorbusinessGAS SENSORS

researchProduct

PEPhysical Sciences and Engineering
- PE2Fundamental Constituents of Matter
  - PE2_1Theory of fundamental interactions
  - PE2_2 Phenomenology of fundamental interactions
  - PE2_3Experimental particle physics with accelerators
  - PE2_4Experimental particle physics without accelerators
  - PE2_6Nuclear, hadron and heavy ion physics
  - PE2_8Gas and plasma physics
  - PE2_5Classical and quantum physics of gravitational interactions
  - PE2_7Nuclear and particle astrophysics
  - PE2_9 Electromagnetism
  - PE2_10Atomic, molecular physics
  - PE2_11Ultra-cold atoms and molecules
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  - PE2_14Lasers, ultra-short lasers and laser physics
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  - PE2_13Quantum optics and quantum information
  - PE2_15Thermodynamics
- PE1Mathematics
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  - PE11_12Semi-conducting and magnetic materials engineering
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LSLife Sciences
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  - LS4_1Organ and tissue physiology and pathophysiology
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  - LS4_6Microbiome and host physiology
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- LS5Neuroscience and Disorders of the Nervous System
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SHSocial Sciences and Humanities
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