6533b837fe1ef96bd12a2a3f
RESEARCH PRODUCT
SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations
Theodor DollJan SpannhakeThomas WassnerGerhard MüllerMartin EickhoffGiorgio SberveglieriAndreas HelwigGuido Fagliasubject
Materials scienceFABRICATIONengineering.materialFILMSlaw.inventionlawImpurityMaterials ChemistryElectrical and Electronic EngineeringSILICONInstrumentationMicroelectromechanical systemsbusiness.industryMetals and AlloysCondensed Matter PhysicsTin oxideSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsMETALengineeringOptoelectronicsDegradation (geology)Noble metalResistorbusinessGAS SENSORSdescription
MEMS micro heater devices capable of long-term operation at temperatures up to 1000 degrees C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film. (c) 2007 Elsevier B.V. All rights reserved.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2007-06-01 |