0000000000857535

AUTHOR

Corinne Nouveau

showing 2 related works from this author

Three steps strategy for thin film growth simulation: example of Cr/CrNx multlayers

2013

Three steps strategy for thin film growth simulation: example of Cr/CrNx multlayers

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
researchProduct

Growth of WC–Cr–N and WC–Al–N coatings in a RF-magnetron sputtering process

2013

Tungsten carbide-based coatings have been used in a wide variety of industrial applications such as high speed cutting tools, extrusion dies, drills, aerospace industries, and more. A few reports on ternary and quaternary coatings of WC with other elements indicate good prospects for these material systems. The present study focuses on the formation of quaternary WCeCreN and WCeAleN coatings during the simultaneous reactive RF-magnetron sputtering of tungsten carbide and Al or Cr targets in an argon/nitrogen gas mixture. The resulting coatings, with thicknesses of 3.5 mme8.2 mm, were characterized by using several analytical techniques including X-ray diffraction, SEM/EDS, AFM, and X-ray ph…

010302 applied physicsMaterials scienceMetallurgychemistry.chemical_element02 engineering and technologySputter depositionNitrideTungsten021001 nanoscience & nanotechnologyCondensed Matter PhysicsMicrostructure01 natural sciencesSurfaces Coatings and FilmsAmorphous solidchemistry.chemical_compoundchemistrySputteringTungsten carbide0103 physical sciencesThin film0210 nano-technologyInstrumentationVacuum
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