Three steps strategy for thin film growth simulation: example of Cr/CrNx multlayers

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RESEARCH PRODUCT

Three steps strategy for thin film growth simulation: example of Cr/CrNx multlayers

Aurélien Besnard Amel Zairi Corinne Nouveau Nicolas Martin

subject

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

description

Three steps strategy for thin film growth simulation: example of Cr/CrNx multlayers

year	journal	country	edition	language
2013-01-01

https://hal.science/hal-00944591

PEPhysical Sciences and Engineering
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