0000000000872726
AUTHOR
Pierre Paufert
Watching adsorption and electron beam induced decomposition on the model system Mo(CO)(6)/Cu(111) by X-ray absorption and photoemission spectroscopies
Abstract An in-depth study of the first steps of electron beam assisted growth of Mo from molybdenum hexacarbonyl on Cu(1 1 1) has been carried out exploiting the complementarity of X-ray photoemission and X-ray absorption spectroscopies. Frank van der Merwe (2D) growth mode has been observed for the completion of the two first monolayers of adsorbed molecules through a simple physisorption process. Irradiation of the Mo(CO)6 deposit by 1 keV electron beam induces a modification of molybdenum coordination, the average number of C-neighbors decreasing from 6 to 3. Decomposed molecules remain on the surface after annealing at 520 K and organize themselves, the molybdenum atoms moving in Cu(1 …
Innovative electronic lithography using self-assembly films in order to modify material surfaces at nanometric scale
The concept of electon beam decomposition has been developed in order to create smaller patterns than those achieved by conventional lithographic methods. This work aimed to go further about this concept through a separation of the involved mechanisms in order to better understand them and thus reach a better control of process.A device was designed and a protocol was defined where the first stage is the adsorption at cryogenic temperature of metal-carbonyl compounds. The adsorbate is then decomposed by a focused electron beam and fragmentation residues are removed through annealing allowing the deposit reorganization. The study of the different steps of the elaboration method was followed …