0000000000885161
AUTHOR
A. Rudevics
Numerical study of transient behaviour of molten zone during industrial FZ process for large silicon crystal growth
The fully transient axisymmetric model has been developed for calculation of phase boundaries in large (up to 200 mm diameter) industrial floating zone (FZ) silicon single crystal growth with the needle-eye technique. The transient model is implemented in a specialized computer program. The model and program are based on a previously developed model and program for steady-state FZ process calculations. This transient approach allows studying of such substantially time-dependent process phases as the growth of the starting and ending cones of the crystal rod, which are particularly important for growth of large crystals in practice. Numerous calculations are carried out and the results for r…
Numerical study and comparisons with experimental data for transient behaviour of phase boundaries during industrial FZ process for silicon crystal growth
Abstract In our numerical transient model developed previously for the industrial FZ crystal growth process with the needle-eye technique, the meshing algorithms are essentially improved and a significant amount of numerical studies are carried out for model verification. Transient modelling for the experimental growth process with step-like time dependences of inductor current and feed rod velocity has shown that time dependencies of the crystal radius and zone height calculated numerically agree with the data from praxis. The fully transient simulation for growth process of crystal starting cone has shown that the model is capable of performing the simulation even if the crystal diameter …