Spark source mass spectrometric assessment of boron and nitrogen concentrations in crystalline gallium arsenide

The residual or doped element concentration [E] in GaAs measured by SSMS is only accurate with respect to the relative sensitivity coefficient RSCE. For a trace element concentration, the RSCE = [E]SSMS/[E]TRUE is set to unity, if no reference material or method is available to approximate the concentration to the true value. For boron a relative sensitivity coefficient of RSCB = 0.94 ± 0.08 was obtained using TI-IDMS as a reference method. RSCN = 1 is used for nitrogen determinations. A boron and nitrogen detection limit of 4.4 × 1013 cm–3 is achieved. SSMS was used as reference method to calibrate the FTIR factor fE = [E] / Iα due to the integrated local vibrational mode absorption Iα of …