0000000000934230

AUTHOR

Jean-marie Chappe

showing 1 related works from this author

Phase mixture in MOCVD and reactive sputtering TiOxNy thin films revealed and quantified by XPS spectra factorial analysis

2006

International audience

[ SPI.MAT ] Engineering Sciences [physics]/Materials[SPI.MAT] Engineering Sciences [physics]/MaterialsComputingMilieux_MISCELLANEOUS[SPI.MAT]Engineering Sciences [physics]/Materials
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