Phase mixture in MOCVD and reactive sputtering TiOxNy thin films revealed and quantified by XPS spectra factorial analysis

6533b853fe1ef96bd12abeb7

RESEARCH PRODUCT

Phase mixture in MOCVD and reactive sputtering TiOxNy thin films revealed and quantified by XPS spectra factorial analysis

Jérôme Guillot Jean-marie Chappe Olivier Heintz Nicolas Martin Luc Imhoff Jamal Takadoum

subject

[ SPI.MAT ] Engineering Sciences [physics]/Materials [SPI.MAT] Engineering Sciences [physics]/Materials ComputingMilieux_MISCELLANEOUS [SPI.MAT]Engineering Sciences [physics]/Materials

description

International audience

year	journal	country	edition	language
2006-01-01

https://hal.archives-ouvertes.fr/hal-00267639

PEPhysical Sciences and Engineering
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  - PE2_16Non-linear physics
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SHSocial Sciences and Humanities
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