Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films

2005

New type resistive/capacitative gas sensitive structures were obtained by using a specially prepared substrate- glass, covered by thin conducting In/sub 2/O/sub 3/ layer, cutted into a comb teeth-type electrodes by help of laser beam. Such laser processed gap in the layer of conducting material was a prototype of excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain a thin layers of different materials.