A microscopic model for long-term laser damage in calcium fluoride

Single crystal calcium fluoride (CaF 2 ) is an important lens material in deep-ultraviolet optics, where it is exposed to high radiation densities. The known rapid damage process in CaF 2 upon ArF laser irradiation cannot account for irreversible damage after long irradiation times. We use density functional methods to calculate the properties of laser-induced point defects and to investigate defect stabilization mechanisms on a microscopic level. The mobility of the point defects plays a major role in the defect stabilization mechanisms. Besides stabilization by impurities, we find that the agglomeration of F-centers plays a significant role in long-term laser damage of CaF 2 . We present …