Void superlattice formation in electron irradiated CaF2: Theoretical analysis

Abstract CaF2 is widely adopted as deep-UV window material and thin film optical coating. The void superlattice was observed experimentally under electron irradiation at room temperature. We performed kinetic Monte Carlo (kMC) simulations of the initial stages of the process when short- and intermediate-range order of defects in small Ca colloids and larger interstitial aggregates (F2 gas voids) is created. The kMC model includes fluorine interstitial–vacancy pair creation, defect diffusion, similar defect attraction and dissimilar defect recombination. Special attention is paid to the statistical analysis of the defect aggregate distribution functions under different conditions (dose rate,…