Low energy nano diffraction (LEND) – A versatile diffraction technique in SEM

Abstract Electron diffraction is a powerful characterization method that is used across different fields and in different instruments. In particular, the power of transmission electron microscopy (TEM) largely relies on the capability to switch between imaging and diffraction mode enabling identification of crystalline phases and in-depth studies of crystal defects, to name only examples. In contrast, while diffraction techniques have found their way into the realm of scanning electron microscopy (SEM) in the form of electron backscatter diffraction and related techniques, on-axis transmission diffraction is still in its infancy. Here we present a simple but versatile setup that enables a ‘…