6533b7cefe1ef96bd12578af
RESEARCH PRODUCT
Devices based on semiconductor nanowires
Raimonds MeijaDonats ErtsRünno LõhmusJustin D. HolmesJana AndzaneM. StudersPavels Birjukovssubject
Microelectromechanical systemsNanoelectromechanical systemsResonatorMaterials scienceSemiconductorNanoelectronicsbusiness.industryTerahertz radiationQ factorNanowireNanotechnologybusinessdescription
Recently, nanoelectromechanical systems (NEMS) have attracted much attention due to their unique properties and possible applications that differ greatly from those of microelectromechanical systems. NEMS operating frequencies may achieve giga- and terahertz levels and their power consumption and heat capacity is extremely low. Moreover, integration levels may reach 1012 devices per cm−2. In this review, we present techniques for integrating semiconductor materials in NEMS. In particular, we examine fabrication, structure, properties and potential applications of two main classes of NEMS, namely, resonators and switches.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2009-10-01 | 2009 International Semiconductor Conference |