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RESEARCH PRODUCT
Analysis of the dopant segregation effects at the floating zone growth of large silicon crystals
A. MuiznieksA. MuiznieksJanis VirbulisJanis VirbulisA. Mühlbauersubject
ConvectionSiliconDopantCondensed matter physicschemistry.chemical_elementMineralogyCondensed Matter PhysicsRotationInorganic ChemistryCrystalchemistryElectrical resistivity and conductivityHeat transferMaterials ChemistrySingle crystaldescription
Abstract A computer simulation is carried out to study the dopant concentration fields in the molten zone and in the growing crystal for the floating zone (FZ) growth of large (> 100mm) Si crystals with the needle-eye technique and with feed/crystal rotation. The mathematical model developed in the previous work is used to calculate the shape of the molten zone and the velocity field in the melt. The influence of melt convection on the dopant concentration field is considered. The significance of the rotation scheme of the feed rod and crystal on the dopant distribution is investigated. The calculated dopant concentration directly at the growth interface is used to determine the normalized lateral resistivity distribution in the single crystal. The calculated resistivity distributions are compared with lateral spreading resistivity measurements in the single crystal.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1997-10-01 | Journal of Crystal Growth |