6533b7d1fe1ef96bd125cd94
RESEARCH PRODUCT
High-Yield of Memory Elements from Carbon Nanotube Field-Effect Transistors with Atomic Layer Deposited Gate Dielectric
Esko I. KauppinenMarina Y. ZavodchikovaAlbert G. NasibulinAndreas JohanssonPäivi TörmäJ. Jussi ToppariMarcus Rinkiösubject
NanotubeGate dielectricGeneral Physics and AstronomyFOS: Physical sciencesCarbon nanotubeDielectriclaw.inventionCondensed Matter::Materials ScienceComputer Science::Emerging TechnologieslawMesoscale and Nanoscale Physics (cond-mat.mes-hall)Physics::Atomic and Molecular ClustersThin filmCNT FETsPhysicsCondensed Matter - Materials Sciencecarbon nanotubesCondensed Matter - Mesoscale and Nanoscale Physicsbusiness.industryPhysicsTransistorfield-effect transistorsMaterials Science (cond-mat.mtrl-sci)HysteresishysteresisOptoelectronicsField-effect transistorbusinessdescription
Carbon nanotube field-effect transistors (CNT FETs) have been proposed as possible building blocks for future nano-electronics. But a challenge with CNT FETs is that they appear to randomly display varying amounts of hysteresis in their transfer characteristics. The hysteresis is often attributed to charge trapping in the dielectric layer between the nanotube and the gate. This study includes 94 CNT FET samples, providing an unprecedented basis for statistics on the hysteresis seen in five different CNT-gate configurations. We find that the memory effect can be controlled by carefully designing the gate dielectric in nm-thin layers. By using atomic layer depositions (ALD) of HfO$_{2}$ and TiO$_{2}$ in a triple-layer configuration, we achieve the first CNT FETs with consistent and narrowly distributed memory effects in their transfer characteristics.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2008-10-16 |