Fabrication and characterization of chromium based single-electron transistors with evaporated chromium oxide barrier tunnel junctions

6533b7d5fe1ef96bd1263b64

RESEARCH PRODUCT

Fabrication and characterization of chromium based single-electron transistors with evaporated chromium oxide barrier tunnel junctions

Yu. A. Pashkin Jukka P. Pekola Leonid Kuzmin

subject

Materials science Fabrication Chromium Compounds business.industry Bilayer General Engineering chemistry.chemical_element Nanotechnology Evaporation (deposition)Chromium Resist chemistry Optoelectronics business Lithography Electron-beam lithography

description

We fabricated chromium based single-electron transistors comprising small-area Cr/CrOx/Cr tunnel junctions with an evaporated chromium oxide barrier. The transistors are fabricated using e-beam lithography with a bilayer resist and two-angle shadow evaporation. We describe the fabrication process and discuss the device characteristics.

year	journal	country	edition	language
1999-01-01	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

https://doi.org/10.1116/1.590769

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