6533b7dbfe1ef96bd1270004

RESEARCH PRODUCT

Recent improvements on micro-thermocouple based SThM

Damien TeyssieuxPascal VairacLaurent ThieryTran Phong NguyenDanick Briand

subject

010302 applied physicsHistoryMicroscopeMaterials scienceSystem of measurementQuartz tuning forkNanotechnologyContact strength02 engineering and technologySolid material021001 nanoscience & nanotechnology01 natural sciencesComputer Science ApplicationsEducationlaw.inventionThermocouplelaw0103 physical sciencesThermal0210 nano-technologyTemperature mapping

description

The scanning thermal microscope (SThM) has become a versatile tool for local surface temperature mapping or measuring thermal properties of solid materials. In this article, we present recent improvements in a SThM system, based on a micro-wire thermocouple probe associated with a quartz tuning fork for contact strength detection. Some results obtained on an electrothermal micro-hotplate device, operated in active and passive modes, allow demonstrating its performance as a coupled force detection and thermal measurement system.

https://doi.org/10.1088/1742-6596/785/1/012005