6533b7dcfe1ef96bd1272c0d
RESEARCH PRODUCT
Cathodo- and Photo- Luminescence of Silicon Rich Oxide Films Obtained by LPCVD
Ciro FalconyRosa López-estopierMariano Aceves-mijaressubject
PhotoluminescenceMaterials scienceSiliconbusiness.industryAnnealing (metallurgy)Oxidechemistry.chemical_elementChemical vapor depositionPhotochemistrychemistry.chemical_compoundchemistryOptoelectronicsElectronicsbusinessSilicon oxideLuminescencedescription
Silicon technology dominates the electronics industry today, so it is highly desirable the development of silicon-based components compatible with silicon technology, allowing integration of electrical and optical components on a single chip. One promising approach to the development of a silicon based light emitter is Silicon Rich Oxide (SRO), also called offstoichiometric silicon oxide. The interest on the optical properties of this material has grown since it was demonstrated that SRO films subjected to high-temperature annealing exhibit efficient photoluminescence (PL) (Iacona et al., 2000; Shimizu-Iwayama et al., 1996).
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2012-03-28 |