6533b7ddfe1ef96bd1273d61
RESEARCH PRODUCT
Structural characterization of mixed Ta–Re oxide films
R. KalendarevEnzo CazzanelliJ. PuransJ. PuransMarco CastriotaAlexei Kuzminsubject
Materials scienceInorganic chemistryOxideAnalytical chemistrychemistry.chemical_elementGeneral ChemistryRheniumCondensed Matter PhysicsAmorphous solidMetalchemistry.chemical_compoundsymbols.namesakechemistryvisual_artPhase (matter)Cavity magnetronvisual_art.visual_art_mediumsymbolsGeneral Materials ScienceThin filmRaman spectroscopydescription
Thin films of mixed Ta and Re oxides have been produced by reactive dc magnetron co-sputtering of pure Ta and Re metal targets in Ar–O2 atmosphere. The structural evolution of these films has been studied as a function of the composition, starting from a pure tantalum oxide film up to about 82% rhenium content. The composition and the structure of the films have been investigated by using X-ray diffraction and micro-Raman spectroscopy. For low Re content (20%), islands of a well crystallized phase, based on ReO4 groups, appear in the films still composed by pure amorphous tantalum oxide, while a mixed disordered solid phase is found for the highest Re concentration (82%). © 2006 Elsevier B.V. All rights reserved.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2006-10-15 | Solid State Ionics |