6533b7ddfe1ef96bd1274746

RESEARCH PRODUCT

LASERIX: an open facility for developments of Soft X-ray and EUV lasers and applications

David RosKevin CassouP. ZeitounG. MourouOlivier GuilbaudSophie KazamiasBrigitte CrosGilles MaynardMoana PittmanD. ZimmerJ. C. LagronThomas KuehlB. Zielbauer

subject

PhysicsSoft x rayOpticsOpen facilityExtreme Light Infrastructurebusiness.industrylawExtreme ultraviolet lithographyExtreme ultravioletbusinessLaserlaw.invention

description

In this paper we report the perspectives of the development of the XUV laser sources and applications using High-power laser facilities. We focus our paper on the present status of the French LASERIX facility and more especially about its role in the development of the XUV laser sources considering the French "Institut de la Lumiere Extreme " (ILE) and the potential European project Extreme Light Infrastructure (ELI). Finally, we present the scientific perspectives of X-ray laser sources developments using these laser facilities.

https://doi.org/10.1117/12.886641