6533b7defe1ef96bd1275f03
RESEARCH PRODUCT
High power impulse magnetron sputtering of Zn/Al target in an Ar and Ar/O2 atmosphere: The study of sputtering process and AZO films
Juris PuransMartins ZubkinsH. ArslanLiga Biksesubject
Materials scienceReactive sputteringAnalytical chemistryAl (AZO) films [ZnO]02 engineering and technology7. Clean energy01 natural sciencesSputteringElectrical resistivity and conductivity0103 physical sciencesMaterials ChemistryTransmittance:NATURAL SCIENCES:Physics [Research Subject Categories]Thin filmPower density010302 applied physicsPulse durationHiPIMSSurfaces and InterfacesGeneral ChemistryPartial pressure021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and FilmsSustained self-sputteringHigh-power impulse magnetron sputtering0210 nano-technologyRoom temperature depositiondescription
Financial support provided by Scientific Research Project for Students and Young Researchers Nr. SJZ/2017/4 realised at the Institute of Solid State Physics, University of Latvia is greatly acknowledged.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2019-07-01 | Surface and Coatings Technology |