6533b7defe1ef96bd12765e7

RESEARCH PRODUCT

A MEMS array-type Mirau interferometer for swept-source OCT imaging with applications in dermatology

O. GaiiffeLuc FroehlyJ. LullinC. GoreckiS. BargielStéphane PerrinN. Passilly

subject

Microelectromechanical systemsMicrolensMaterials sciencemedicine.diagnostic_testbusiness.industryMirau interferometerArray data type02 engineering and technology021001 nanoscience & nanotechnology01 natural sciences010309 opticsInterferometryOpticsOptical coherence tomographyMicrosystem0103 physical sciencesmedicineOptoelectronics0210 nano-technologybusiness

description

In the frame the European project VIAMOS (www.viamos.eu) we developed a microsystem based on Mirau interferometry and applied for optical coherence tomography (OCT) imaging of living tissues. The objective is to benefit from advanced MOEMS technologies, enabling a new generation of miniature and low-cost instruments using the concept of the swept-source OCT (SS-OCT) microsystem based on spectrally tuned Mirau interferometry, into which a doublet of microlens matrices (4×4) and a wafer of movable reference mirrors are included, building the active Mirau interferometer.

https://doi.org/10.1109/transducers.2017.7994462