6533b81ffe1ef96bd1277987
RESEARCH PRODUCT
false
subject
010302 applied physicsMaterials sciencebusiness.industryDirect currentSurface plasmonPhysics::Opticschemistry.chemical_element02 engineering and technology021001 nanoscience & nanotechnology01 natural sciencesDrude modelSurface plasmon polaritonAtomic and Molecular Physics and OpticsCondensed Matter::Materials ScienceOpticschemistryElectrical resistivity and conductivityPhysical vapor deposition0103 physical sciencesOptoelectronics0210 nano-technologybusinessTinPlasmondescription
Damping distances of surface plasmon polariton modes sustained by different thin titanium nitride (TiN) films are measured at the telecom wavelength of 1.55 μm. The damping distances are correlated to the electrical direct current resistivity of the films sustaining the surface plasmon modes. It is found that TiN/Air surface plasmon mode damping distances drop non-linearly from 40 to 16μm as the resistivity of the layers increases from 28 to 130μΩ.cm, respectively. The relevance of the direct current (dc) electrical resistivity for the characterization of TiN plasmonic properties is investigated in the framework of the Drude model, on the basis of parameters extracted from spectroscopic ellipsometry experiments. By probing a parametric space of realistic values for parameters of the Drude model, we obtain a nearly univocal dependence of the surface plasmon damping distance on the dc resistivity demonstrating the relevance of dc resistivity for the evaluation of the plasmonic performances of TiN at telecom frequencies. Finally, we show that better plasmonic performances are obtained for TiN films featuring a low content of oxygen. For low oxygen content and corresponding low resistivity, we attribute the increase of the surface plasmon damping distances to a lower confinement of the plasmon field into the metal and not to a decrease of the absorption of TiN.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2018-04-05 | Optics Express |