6533b81ffe1ef96bd127877d

RESEARCH PRODUCT

Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition.

Donats ErtsZanda AluteKristaps KovalevskisAnastasiya ZalesskayaRoman ViterPhilippe MieleAdib Abou ChaayaValentyn SmyntynaMikhael BechelanyVincent Rouessac

subject

optical propertiesPhotoluminescenceMaterials scienceBand gapGeneral Physics and AstronomyNanotechnology02 engineering and technologylcsh:Chemical technology010402 general chemistrylcsh:Technology01 natural sciencesFull Research PaperAtomic layer depositionCondensed Matter::Materials ScienceTransmittance[CHIM]Chemical SciencesNanotechnologylcsh:TP1-1185General Materials ScienceElectrical and Electronic EngineeringThin filmlcsh:ScienceComputingMilieux_MISCELLANEOUSlcsh:Tbusiness.industry021001 nanoscience & nanotechnologyMicrostructurelcsh:QC1-9990104 chemical sciencesAmorphous solidNanosciencethin filmsatomic layer depositionZnOOptoelectronicslcsh:QphotoluminescenceCrystallite0210 nano-technologybusinesslcsh:Physics

description

A study of transmittance and photoluminescence spectra on the growth of oxygen-rich ultra-thin ZnO films prepared by atomic layer deposition is reported. The structural transition from an amorphous to a polycrystalline state is observed upon increasing the thickness. The unusual behavior of the energy gap with thickness reflected by optical properties is attributed to the improvement of the crystalline structure resulting from a decreasing concentration of point defects at the growth of grains. The spectra of UV and visible photoluminescence emissions correspond to transitions near the band-edge and defect-related transitions. Additional emissions were observed from band-tail states near the edge. A high oxygen ratio and variable optical properties could be attractive for an application of atomic layer deposition (ALD) deposited ultrathin ZnO films in optical sensors and biosensors.

10.3762/bjnano.4.78https://pubmed.ncbi.nlm.nih.gov/24205465