6533b820fe1ef96bd12798e9
RESEARCH PRODUCT
Sputtered SiOxNy thin films: improving optical efficiency of liquid crystal diffuser elements in multi-focal near-to-eye display architecture
Elza LininaAinars OzolsRoberts ZabelsIlmars OsmanisGatis MozolevskisEdvins LetkoMartins Rutkissubject
Silicon oxynitrideMaterials sciencebusiness.industryDielectricchemistry.chemical_compoundchemistryStack (abstract data type)Liquid crystalPhysical vapor depositionOptoelectronicsThin filmbusinessDiffuser (optics)Refractive indexdescription
In this work we present reactive sputtered SiOxNy films with a variable refractive index as a convienent solution for contrast improvement of liquid crystal diffuser multi stacks in near-to-eye AR/VR displays. The focus concerns minimization of light reflections between internal structures, in particular ITO, by optimizing internal layers through tailored properties of thin film coatings, as well as subsequent laser patterning of thin film stack. Inorganic thin films have been deposited on glass by physical vapor deposition. Corresponding refractive index, thickness, uniformity and dielectric characteristics and other electro-optical properties have been measured and their impact on the resulting optical performance of the final integrated element stack has been compared against counterparts utilizing traditional polyimide and SiOx films.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2021-09-12 | Advances in Optical Thin Films VII |